Sapteka, Anak Agung Ngurah Gde and Narottama, Anak Agung Ngurah Made and Yasa, Kadek Amerta (2020) Modelling of Phosphorus and Boron Doping Concentration on SOI Wafer Based Diffusion Process. Logic: Jurnal Rancang Bangun dan Teknologi, 20 (1). pp. 53-58. ISSN 1412114X
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Official URL: https://doi.org/10.31940/logic.v20i1.1748
| Item Type: | Article |
|---|---|
| Subjects: | Ilmu Teknik > Teknik Elektro Dan Informatika > Teknik Elektro |
| Divisions: | Jurusan Teknik Elektro > Prodi D4 Teknik Otomasi > Publikasi |
| Depositing User: | Kadek Amerta Yasa |
| Date Deposited: | 30 Apr 2023 06:55 |
| Last Modified: | 30 Apr 2023 16:29 |
| URI: | http://repository.pnb.ac.id/id/eprint/5418 |
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